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锟斤拷锟斤拷燃锟较碉拷锟斤拷锟斤拷锟狡斤拷母锟斤拷桑锟斤拷锟叫╋拷锟侥革拷锟斤拷锟斤拷锟缴聚讹拷锟阶癸拷锟斤拷锟斤拷(PDMS)锟斤拷锟斤拷锟狡成的斤拷锟斤拷锟叫ｏ拷锟斤拷同锟斤拷锟斤拷锟剿达拷燃锟较碉拷亍锟斤拷锟窖э拷锟侥壳帮拷锟斤拷锟斤拷锟斤拷锟斤拷锟饺硷拷系锟截碉拷锟斤拷品锟斤拷微锟阶硷拷锟侥ｏ拷锟斤拷锟轿�15平锟斤拷微锟阶ｏ拷锟斤拷1.4微锟阶★拷锟斤拷锟叫撅拷锟缴癸拷锟斤拷锟斤拷锟斤拷锟斤拷锟铰筹拷锟斤拷摹锟轿拷锟斤拷锟较低筹拷锟街撅拷锟斤拷锟�Journal of Microelectrical Systems 锟斤拷锟较★拷
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Journal of Microelectrical Systems 锟斤拷锟斤拷DOI: 10.1109/JMEMS.2008.2006816锟斤拷Siu, C.-P.-B.锟斤拷Mu Chiao 锟斤拷
